China Begins Mass Production of Homegrown DUV Chip Tools

中国开始量产国产深紫外（DUV）光刻机

来源: tomshardware.com | 主题: China | 评论: 42

时间: on Monday July 27, 2026 @03:00PM

According to The Information (paywalled), a state-backed Shanghai company has begun mass-producing China's first homegrown immersion DUV lithography machines , with about five units expected this year for SMIC, Hua Hong, and CXMT. Roughly 20 more units are expected in 2027. Tom's Hardware reports: The Information didn't name the manufacturer, but its sources described the operation as having pulled DUV development teams from several Chinese companies, one of them the state-backed startup Shanghai Yuliangsheng Technology. SMIC has been testing a Yuliangsheng immersion tool since September 2025. Most components in the new systems are domestic, though some critical parts still come from Japan, and delays at local suppliers have held back output this year. [...] China accounts for around 20% o

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